Quantitative analysis of semiconductor alloy composition during growth by reflection-electron energy loss spectroscopy
نویسندگان
چکیده
منابع مشابه
Surface microanalysis by reflection electron energy-loss spectroscopy.
Several basic physical concepts of applying eq. Ik = I sigma Nxt to surface microanalysis by reflection electron energy-loss spectroscopy (REELS) are clarified. Here Ik and I are the integrated intensities of the core ionization edge and the low loss part, sigma is the scattering cross section of element x with atomic concentration Nx, and t is the specimen thickness. The reflected inelastic el...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 1992
ISSN: 0734-211X
DOI: 10.1116/1.586443